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SILICON MICROSTRUCTURES INCORPORATED
*
SM5430/SM5470
Low Cost Packaged Pressure Sensors
SURFACE MOUNT AND DIP PRESSURE SENSORS LOW-COST PACKAGED DIE
DESCRIPTION
Silicon Microstructures provides its two most popular pressure sensor die in surface mount dual in-line package (SO-16) configuration. All parts in these series are uncompensated high-performance die mounted in an injection-molded package designed for surface mounting. These packaged sensor die provide a way for OEM manufacturers to incorporate pressure sensors at costs close to raw die prices, without the need to handle, attach, or wire bond silicon sensor die. Options include pressure range, absolute or gage configuration, and a choice of cap configurations. The result is a versatile product line suitable for a wide range or OEM applications. The low-pressure series (model SM5470) incorporate Silicon Microstructures unique low-pressure die to achieve high performance in pressure ranges from 0.15 PSI full-scale to 3 PSI full-scale in gauge and differential configuration. The model SM5430 comes in gauge, differential, and absolute versions for pressure ranges from 5 PSI to 100 PSI.
FEATURES
* * * * * * Low pressure (from 0-0.15 to 0-100 PSI FS) Easy to Use Compact and Light-weight High-performance, Stable Silicon Chip and Package Easily Embedded in OEM Equipment High-volume, Low Cost
APPLICATIONS
* * * * * * * * * * * Altimeters Barometric Correction Tire Gauges Digital Pressure Gauges Environmental Monitoring Appliances Consumer and Sports HVAC Medical Instrumentation and Monitoring Pressure Differential and Flow Monitoring Hand-held Gauges
Rev 1.3 07_06 2004-2006 Silicon Microstructures, Inc. 1701 McCarthy Blvd. Milpitas, CA 95035 USA Tel: 408-577-0100 Fax: 408-577-0123 sales@si-micro.com www.si-micro.com
SM5430/SM5470
CHARACTERISTICS FOR SM5430/SM5470 - SPECIFICATIONS
All parameters measure at 5V excitation at room temperature, unless otherwise specified.
All Models
Parameter Excitation Voltage Excitation Current Offset TC Span TC Resistance Bridge Impedance Operating Temp Storage Temp Min.
0 0 SM5470 SM5430
Typ.
5.0 1.5
Max.
10.0 3.0
Units
V mA mV mV %FS/100C %/100C k C C
Notes
-75 -50
-15 33 2.7 -40 -55
-30 0
-19 28 3.3
+25 +50
-24 25 4.0 85 125
1 1
SM5430 Standard Pressure Series
Span (FS Range), PSI (kPa) 5 (34) 15 (103) 30 (207) 60 (414) 100 (689) Linearity TC Offset Burst Pressure Min.
75 105 115 115 115 -0.2 -5 >5X
Typ.
100 145 165 180 200 + 0.07 -1
Max.
125 175 195 220 250 +0.2 +5
Units
mV mV mV mV mV %FS %FS/100C Rated FS Pressure
Notes
3 3 3 3 3 4 1 2
SM5470 Low Pressure Series Only
Span (FS Range), PSI (kPa) 0.15 (1.03) 0.30 (2.07) 0.80 (5.52) 1.50 (10.3) 3.00 (20.7) Linearity TC Offset Burst Pressure
Notes:
Min.
25 25 25 25 25 -0.3 15X
Typ.
50 50 50 50 50 + 0.1 + 12
Max.
85 85 85 85 85 +0.3
Units
mV mV mV mV mV %FS %FS/100C Rated FS Pressure
Notes
3 3 3 3 3 4 1 2
1. Measured from 0 to 70C 2. Sensor die will survive pressure specified for all ranges. Maximum package pressure is 150 PSI. 3. Measured at 5V, constant voltage excitation 4. Defined s best-fit straight line (BFSL); for 0.3 PSI full-scale, linearity is + 0.5%FS. For 0.15 PSI full-scale, linearity is + 2.5%FS. ORDERING INFORMATION Pressure Type A: Absolute (except 5470) G: Gauge D: Differential Available Cap Type B: Horizontal Barbed port(s) C: Vertical Barbed port(s) Std. Pressure Ranges PSI 5430 5 005 15 015 30 030 60 060 100 100 Low Pressure Ranges PSI 5470 0.15 001 0.30 003 0.80 008 1.50 015 3.00 030
SM5470 - 008 - G - B
Rev 1.3 07_06 2004-2006 Silicon Microstructures, Inc. 1701 McCarthy Blvd. Milpitas, CA 95035 USA Tel: 408-577-0100 Fax: 408-577-0123 sales@si-micro.com www.si-micro.com
Pin Out -- SM5430/SM5470
Rev 1.3 07_06 2004-2006 Silicon Microstructures, Inc. 1701 McCarthy Blvd. Milpitas, CA 95035 USA Tel: 408-577-0100 Fax: 408-577-0123 sales@si-micro.com www.si-micro.com
SM5430/SM5470
B- Horizontal Barb Configuration
19.600.25 10.260.25 1.270.04 [TYP]
0.410.08 16PL 0.840.10
5.540.25
0.250.02
3.000.08
5.000.08
O1.10
7.520.13 10.310.20
1
3.000.08
DIFFERENTIAL TYPE
4+3 -0
5.540.25 3.000.08
NOTE: 1) ALL THE DIMENSIONS ARE IN MM 2) GAUGE/ABSOLUTE TYPE DIMENSIONS ARE SAME AS DIFFERENTIAL TYPE EXCEPT GAUGE/ABSOLUTE TYPE HAS ONE SIDE PORT
1
GAUGE / ABSOLUTE TYPE
C- Vertical Barb Configuration
10.260.25 1.270.04 [TYP]
0.410.08 16PL 0.840.10 3.000.08 5.540.25 0.250.02
2XO3.00
7.520.13 10.310.20
2XO2.21 2XO1.24
PIN 1 MARKING
3.000.08
1 5.50
4+3 -0
DIFFERENTIAL TYPE
1
10.390.25
GAUGE / ABSOLUTE TYPE NOTE: 1) ALL THE DIMENSIONS ARE IN MM 2) GAUGE/ABSOLUTE TYPE DIMENSIONS ARE SAME AS DIFFERENTIAL TYPE EXCEPT GAUGE/ ABSOLUTE TYPE HAS ONE VERTICAL PORT
Dimensions (in millimeters) -- SM5430/SM5470
Notice:
Silicon Microstructures, Inc. reserves the right to make changes to the product contained in this publication. Silicon Microstructures, Inc. assumes no responsibility for the use of any circuits described herein, conveys no license under any patent or other right, and makes no representation that the circuits are free of patent infringement. While the information in this publication has been checked, no responsibility, however, is assumed for inaccuracies. Silicon Microstructures, Inc. does not recommend the use of any of its products in life support applications where the failure or malfunction of the product can reasonably be expected to cause failure of a life-support system or to significantly affect its safety or effectiveness. Products are not authorized for use in such applications
Rev 1.3 07_06 2004-2006 Silicon Microstructures, Inc. 1701 McCarthy Blvd. Milpitas, CA 95035 USA Tel: 408-577-0100 Fax: 408-577-0123 sales@si-micro.com www.si-micro.com

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